AQN Series
Wafer AOI Machine

AQN Series - Wafer AOI Machine

This is a high speed and high accuracy vision inspection system which provides mapping view and information. Its front pusher is installed with laser sensor to detect the absence and presence of the frame. Its shutter is equipped with pneumatic clamper and moves in X & Y axis for vision inspection. Vacuum sensor is installed in gripper system to detect frame slippage. It contains inking system to do marking on defect unit for ease of traceability. The frame will then be transfer back to the magazine after vision inspection and inking for defect unit.


High Speed Inspection
Real Time Review System
Treatment Function
Vacuum Chuck/Stretcher/Pepper Pot
E-mapping and Actual Pick Comparison (Wafer Skeleton)


Subject Details
Package Type Semiconductor Device
Accuracy ± 0.010mm
Controller PC Based
Communication IO, Serial Port, Ethernet
Dimension 1,900 mm(L) x 900mm(D) x 1,650mm(H)

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